Imaging of carbon nanomembranes with helium ion microscopy

被引:15
|
作者
Beyer, Andre [1 ]
Vieker, Henning [2 ]
Klett, Robin [1 ]
Theenhausen, Hanno Meyer Zu [1 ]
Angelova, Polina [2 ]
Goelzhaeuser, Armin [1 ]
机构
[1] Univ Bielefeld, Phys Supramol Syst & Surfaces, D-33615 Bielefeld, Germany
[2] CNM Technol GmbH, D-33609 Bielefeld, Germany
来源
BEILSTEIN JOURNAL OF NANOTECHNOLOGY | 2015年 / 6卷
关键词
2D materials; carbon nanomembrane; helium ion microscopy; self-assembled monolayers; SELF-ASSEMBLED MONOLAYERS; CHEMICAL LITHOGRAPHY; FABRICATION; NANOSHEETS; NANOLITHOGRAPHY;
D O I
10.3762/bjnano.6.175
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon nanomembranes (CNMs) prepared from aromatic self-assembled monolayers constitute a recently developed class of 2D materials. They are made by a combination of self-assembly, radiation-induced cross-linking and the detachment of the cross-linked SAM from its substrate. CNMs can be deposited on arbitrary substrates, including holey and perforated ones, as well as on metallic (transmission electron microscopy) grids. Therewith, freestanding membranes with a thickness of 1 nm and macroscopic lateral dimensions can be prepared. Although free-standing CNMs cannot be imaged by light microscopy, charged particle techniques can visualize them. However, CNMs are electrically insulating, which makes them sensitive to charging. We demonstrate that the helium ion microscope (HIM) is a good candidate for imaging freestanding CNMs due to its efficient charge compensation tool. Scanning with a beam of helium ions while recording the emitted secondary electrons generates the HIM images. The advantages of HIM are high resolution, high surface sensitivity and large depth of field. The effects of sample charging, imaging of multilayer CNMs as well as imaging artefacts are discussed.
引用
收藏
页码:1712 / 1720
页数:9
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