Analysis of ellipsometric and thermoreflectance spectra for P-based III-V compounds GaP and InP

被引:6
作者
Yoshikawa, H
Adachi, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1996年 / 35卷 / 12A期
关键词
GaP; InP; dielectric constant; critical point; spectroscopic ellipsometry; thermoreflectance; modulation spectroscopy;
D O I
10.1143/JJAP.35.5946
中图分类号
O59 [应用物理学];
学科分类号
摘要
Spectroscopic-ellipsometry (SE) and thermoreflectance (TR) spectra of GaP and InP are presented. Both measurements are carried out on the same samples in the 1.4-5.6-eV photon-energy range at room temperature. The measured SE and TR spectra reveal distinct structures at energies of the E(0), E(0) + Delta(0), E(1), E(0)(,), E(2) and E(2) + delta critical points. The Gamma(8)(v) --> X(6)(c) indirect-gap peak at 2.25eV can also be clearly seen in the TR spectrum of GaP. These spectra are analysed based on a simplified model of the interband transitions. The results agree well with the experimental SE and TR data over the entire range of photon energies.
引用
收藏
页码:5946 / 5954
页数:9
相关论文
共 36 条
  • [31] Smith D. Y., 1985, Handbook of Optical Constants of Solids, P35
  • [32] Optical properties of SnTe
    Suzuki, N
    Adachi, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1995, 34 (11): : 5977 - 5983
  • [33] OPTICAL-PROPERTIES OF PBTE
    SUZUKI, N
    ADACHI, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (1A): : 193 - 198
  • [34] OPTICAL-PROPERTIES OF PBSE
    SUZUKI, N
    SAWAI, K
    ADACHI, S
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (03) : 1249 - 1255
  • [35] Optical constants of Pb1-xSnxTe alloys
    Suzuki, N
    Adachi, S
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (04) : 2065 - 2069
  • [36] Willardson R.K., 1972, SEMICONDUCTORS SEMIM, V9