Sparse modeling of EELS and EDX spectral imaging data by nonnegative matrix factorization

被引:87
|
作者
Shiga, Motoki [1 ]
Tatsumi, Kazuyoshi [2 ]
Muto, Shunsuke [2 ]
Tsuda, Koji [3 ,7 ,8 ]
Yamamoto, Yuta [4 ]
Mori, Toshiyuki [5 ]
Tanji, Takayoshi [6 ]
机构
[1] Gifu Univ, Dept Elect Elect & Comp Engn, Gifu 5011193, Japan
[2] Nagoya Univ, Inst Mat & Syst Sustainabil, Adv Measurement Technol, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[3] Univ Tokyo, Grad Sch Frontier Sci, 5-1-5 Kashiwanoha, Kashiwa, Chiba 2778561, Japan
[4] Nagoya Univ, Inst Mat & Syst Sustainabil, High Voltage Electron Microscope Lab, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[5] Natl Inst Mat Sci, Environm & Energy Mat Div, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[6] Nagoya Univ, Inst Mat & Syst Sustainabil, Div Mat Res, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[7] Natl Inst Mat Sci, Ctr Mat Res Informat Integrat, 1-2-1 Sengen, Tsukuba, Ibaraki 3050047, Japan
[8] Natl Inst Adv Ind Sci & Technol, Biotechnol Res Inst Drug Discovery, Koto Ku, 2-4-7 Aomi, Tokyo 1350064, Japan
关键词
Spectral imaging; Nonnegative matrix factorization; Sparse modeling; Automatic relevance determination; Spatial orthogonality; ENERGY-LOSS SPECTROSCOPY; TRANSMISSION ELECTRON-MICROSCOPY; COMPONENT ANALYSIS; ACTIVE MATERIAL; RESOLVED EELS; IMAGES; ALGORITHMS; LITHIUM; DEGRADATION; INFORMATION;
D O I
10.1016/j.ultramic.2016.08.006
中图分类号
TH742 [显微镜];
学科分类号
摘要
Advances in scanning transmission electron microscopy (STEM) techniques have enabled us to automatically obtain electron energy-loss (EELS)/energy-dispersive X-ray (EDX) spectral datasets from a specified region of interest (ROI) at an arbitrary step width, called spectral imaging (SI). Instead of manually identifying the potential constituent chemical components from the ROI and determining the chemical state of each spectral component from the SI data stored in a huge three-dimensional matrix, it is more effective and efficient to use a statistical approach for the automatic resolution and extraction of the underlying chemical components. Among many different statistical approaches, we adopt a non negative matrix factorization (NMF) technique, mainly because of the natural assumption of non-negative values in the spectra and cardinalities of chemical components, which are always positive in actual data. This paper proposes a new NMF model with two penalty terms: (i) an automatic relevance determination (ARD) prior, which optimizes the number of components, and (ii) a soft orthogonal constraint, which clearly resolves each spectrum component. For the factorization, we further propose a fast optimization algorithm based on hierarchical alternating least-squares. Numerical experiments using both phantom and real STEM-EDX/EELS SI datasets demonstrate that the ARD prior successfully identifies the correct number of physically meaningful components. The soft orthogonal constraint is also shown to be effective, particularly for STEM-EELS SI data, where neither the spatial nor spectral entries in the matrices are sparse. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:43 / 59
页数:17
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