Pulsed laser deposition of thin films for optical applications

被引：18
作者：
Afonso, CN
Gonzalo, J
机构：
[1] Instituto de Optica, CSIC, 28006 Madrid
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 116卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(96)00078-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Pulsed laser deposition is a recently developed technique which is producing very good results for the growth of complex compound films. This work reviews some results obtained so far in the application of this technique to grow oxide films for optical applications. The high density of PLD films and the role of a gas environment on the film homogeneity, composition acid optical properties are illustrated with various examples.
引用
收藏
页码：404 / 409
页数：6
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