Pulsed laser deposition of thin films for optical applications

被引：18
作者：
Afonso, CN
Gonzalo, J
机构：
[1] Instituto de Optica, CSIC, 28006 Madrid
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 116卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(96)00078-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Pulsed laser deposition is a recently developed technique which is producing very good results for the growth of complex compound films. This work reviews some results obtained so far in the application of this technique to grow oxide films for optical applications. The high density of PLD films and the role of a gas environment on the film homogeneity, composition acid optical properties are illustrated with various examples.
引用
收藏
页码：404 / 409
页数：6
相关论文
共 40 条
  • [1] Afonso C., 1995, INSULATING MAT OPTOE
  • [2] CORRELATION BETWEEN OPTICAL-PROPERTIES, COMPOSITION, AND DEPOSITION PARAMETERS IN PULSED-LASER DEPOSITED LINBO3 FILMS
    AFONSO, CN
    GONZALO, J
    VEGA, F
    DIEGUEZ, E
    WONG, JCC
    ORTEGA, C
    SIEJKA, J
    AMSEL, G
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (12) : 1452 - 1454
  • [3] LITHIUM-NIOBATE FILMS GROWN BY EXCIMER-LASER DEPOSITION
    AFONSO, CN
    VEGA, F
    GONZALO, J
    ZALDO, C
    [J]. APPLIED SURFACE SCIENCE, 1993, 69 (1-4) : 149 - 155
  • [4] LASER ABLATION OF GE IN AN OXYGEN ENVIRONMENT - PLASMA AND FILM PROPERTIES
    AFONSO, CN
    VEGA, F
    SOLIS, J
    CATALINA, F
    ORTEGA, C
    SIEJKA, J
    [J]. APPLIED SURFACE SCIENCE, 1992, 54 : 175 - 179
  • [5] AFONSO CN, IN PRESS APPL SURF S
  • [6] [Anonymous], 1983, HDB THIN FILM TECHNO
  • [7] CHEN LC, 1994, PULSED LASER DEPOSIT, pCH6
  • [8] Cheung J. T., 1992, Optics & Photonics News, V3, P24, DOI 10.1364/OPN.3.6.000024
  • [9] CHRSIEY DB, 1994, PULSED LASER DEPOSIT
  • [10] OPTICAL-PROPERTIES OF LASER-DEPOSITED A-GE FILMS - A COMPARISON WITH SPUTTERED AND E-BEAM-DEPOSITED FILMS
    DESANDE, JCG
    AFONSO, CN
    ESCUDERO, JL
    SERNA, R
    CATALINA, F
    BERNABEU, E
    [J]. APPLIED OPTICS, 1992, 31 (28): : 6133 - 6138
1234