Correlation between stoichiometry and properties of scandium oxide films prepared by reactive magnetron sputtering

被引：31

作者：

Belosludtsev, Alexandr ^{[1
]}

Juskevicius, Kestutis ^{[1
,2
]}

Ceizaris, Lukas ^{[1
]}

Samuilovas, Romanas ^{[2
]}

Stanionyte, Sandra ^{[1
]}

Jasulaitiene, Vitalija ^{[1
]}

Kicas, Simonas ^{[1
]}

机构：

[1] Ctr Phys Sci & Technol, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania

[2] Optida Ltd, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania

来源：

APPLIED SURFACE SCIENCE | 2018年 / 427卷

关键词：

Scandium oxide; Sc2O3; Stoichiometry; High density; High optical transparency; Reactive magnetron sputtering; SC2O3; THIN-FILMS; OPTICAL-PROPERTIES; COATINGS; GROWTH; DEPOSITION; RESISTANCE; ZIRCONIUM; DEFECTS;

D O I：

10.1016/j.apsusc.2017.08.068

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Scandium oxide films were deposited on fused silica substrates by reactive pulsed DC magnetron sputtering. The use of feed-back optical emission monitoring enabled high-rate reactive deposition of films with tunable stoichiometry and properties. The under-stoichiometric, stoichiometric and over-stoichiometric scandium oxide films were prepared. The compressive stress in films was between 235 and 530 MPa. We showed that phase structure, density, surface roughness and optical properties of the scandium oxide are affected by the film stoichiometry and deposition conditions. Transparent scandium oxide films were slightly hydrophobic (94 +/- 3 degrees), homogeneous with a crystallite size of 20 +/- 5 nm. The lowest extinction coefficient 0.7 x 10(-3), the highest refractive index 2.08 (both quantities at the wavelength of 355 nm) and the highest density 4.1 +/- 0.1 g cm(-3) exhibited film prepared with the stoichiometric composition. Stoichiometric scandium oxide can be used in various optical applications as high refractive index and wide bandgap material. Transitions to under- or over-stoichiometry lead to a decrease of film density, refractive index and increase of the extinction coefficient. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：312 / 318

页数：7

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