Characterization of Ferroelectric Ba0.6Sr0.4TiO3 Thin Films on Different Substrates for Reconfigurable Microwave Application

被引：0

作者：

El-Shaarawy, Heba B. ^{[1
,2
,3
,4
]}

Pacchini, S. ^{[1
,2
,3
,4
]}

Ouagague, B. ^{[1
,2
,3
,4
]}

Payan, S. ^{[5
,6
,7
]}

Rousseau, A. ^{[5
,6
,7
]}

Maglione, M. ^{[5
,6
,7
]}

Plana, R. ^{[1
,2
,3
,4
]}

机构：

[1] CNRS, 7 Ave colonel Roche, F-31077 Toulouse, France

[2] LAAS, F-31077 Toulouse, France

[3] Univ Toulouse, F-31077 Toulouse, France

[4] UPS, INSA, INP, ISAE, F-31077 Toulouse, France

[5] ICMCB, F-33608 Pessac, France

[6] CNRS, F-33608 Pessac, France

[7] Univ Bordeaux 1, F-33608 Pessac, France

来源：

40TH EUROPEAN MICROWAVE CONFERENCE | 2010年

关键词：

LAYER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper addresses the characterization of Ba0.6Sr0.4TiO3 dielectric properties on different dielectric substrates using three different components. First, for low frequencies, metal-insulator-metal (MIM) capacitors are used to determine the BST dielectric constant, loss tangent and tunability for different biasing voltages from 0-30 V showing a tunability range of 66%. For microwave frequency ranges, coplanar waveguides (CPW), and interdigital capacitors (IDCs) are investigated on silicon, R-plane sapphire (Al2O3) and magnesium oxide (MgO) substrates. CPW is used to determine the complex propagation constant, while IDCs are used to determine the BST voltage tunability from 0-55 V over 1-20 GHz. Sapphire and MgO introduce low loss tangent values of 0.03, while sapphire gives better tunability (20% at 18 GHz) than MgO (8.3% at 18 GHz).

引用

页码：886 / 889

页数：4