Measurement of the force exerted on the surface of an object immersed in a plasma

被引:9
作者
Trottenberg, Thomas [1 ]
Richter, Thomas [1 ]
Kersten, Holger [1 ]
机构
[1] Univ Kiel, Inst Expt & Angew Phys, D-24098 Kiel, Germany
关键词
DIAGNOSTICS; PROBE;
D O I
10.1140/epjd/e2015-50743-2
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An experiment is described in which the force exerted by a low-pressure rf plasma on one side of a test surface is measured. The test surface is part of a cubic object immersed in the plasma and is mounted on a pendulum whose small deviations are recorded by a digital camera. The force balance is calibrated by means of an electrostatic method. The measured forces on the surface (4.8 cm(2)) are in the micronewton range and increase with the plasma density, while an increased collisionality reduces the force. The measured forces are discussed on the basis of a simple model taking into account the momentum fluxes across the sheath edge. It is concluded that ion-neutral collisions in the presheath enhance the force caused
引用
收藏
页数:7
相关论文
共 26 条
[1]   Physics of the intermediate layer between a plasma and a collisionless sheath and mathematical meaning of the Bohm criterion [J].
Almeida, N. A. ;
Benilov, M. S. .
PHYSICS OF PLASMAS, 2012, 19 (07)
[2]   Reply to comment on 'Kinetic theory of the presheath and the Bohm criterion' [J].
Baalrud, S. D. ;
Hegna, C. C. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (06)
[3]   Kinetic theory of the presheath and the Bohm criterion [J].
Baalrud, S. D. ;
Hegna, C. C. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (02)
[4]   Instability-Enhanced Collisional Friction Can Determine the Bohm Criterion in Multiple-Ion-Species Plasmas [J].
Baalrud, S. D. ;
Hegna, C. C. ;
Callen, J. D. .
PHYSICAL REVIEW LETTERS, 2009, 103 (20)
[5]   Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films [J].
Bornholdt, S. ;
Itagaki, N. ;
Kuwahara, K. ;
Wulff, H. ;
Shiratani, M. ;
Kersten, H. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 22 (02)
[6]   INVESTIGATION OF AN RF PLASMA WITH SYMMETRICAL AND ASYMMETRICAL ELECTROSTATIC PROBES [J].
GAGNE, RRJ ;
CANTIN, A .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) :2639-&
[7]   Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results? [J].
Godyak, V. A. ;
Demidov, V. I. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (23)
[8]   PROBE DIAGNOSTICS OF NON-MAXWELLIAN PLASMAS [J].
GODYAK, VA ;
PIEJAK, RB ;
ALEXANDROVICH, BM .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3657-3663
[9]   Direct measurement of neutral gas heating in a radio-frequency electrothermal plasma micro-thruster [J].
Greig, A. ;
Charles, C. ;
Hawkins, R. ;
Boswell, R. .
APPLIED PHYSICS LETTERS, 2013, 103 (07)
[10]   ION-MOLECULE REACTIONS, HE++02 AND HE++N2, AT THERMAL ENERGIES AND ABOVE [J].
HEIMERL, J ;
JOHNSEN, R ;
BIONDI, MA .
JOURNAL OF CHEMICAL PHYSICS, 1969, 51 (11) :5041-&