Finite element method simulation of double-ended tuning-fork quartz resonator for application to vibratory gyro-sensor

In the present paper, we propose a double-ended tuning-fork quartz resonator for a flatly supported vibratory gyro-sensor in parallel with its rotating plane. The resonator has the advantages of ease of miniaturization and high resistance to external shock, because the height of the proposed resonator is less than that of the conventional vertical-type tuning-fork. In addition, the proposed resonator has two end-support parts. The resonator also has the following features: (1) the vibration energy of the resonator is trapped in the driving part, therefore the resonator is only slightly affected by the support parts and (2) unwanted output signals can be removed by differential connection of the output signals from two symmetric detection electrodes. The resonator was designed using the finite element method (FEM), and its characteristics were also simulated by FEM. The obtained results show that the double-ended tuning-fork quartz resonator is applicable as a vibratory gyro-sensor, and the I/O voltage ratio of the gyro-sensor was found to be proportional to the applied angular velocity. That is, we clarified that the double-ended tuning-fork quartz resonator could be used as a gyro-sensor.