Microhollow cathode discharges

By reducing the dimensions of hollow cathodes into the hundred micrometer range, stable, direct current, high (atmospheric) pressure glow discharges in rare gases, rare gas-halide mixtures and in air could be generated. The electron energy distribution in these microdischarges is non-Maxwellian, with a pronounced high-energy tail. The high electron energy together with the high gas density, which favors three-body collisions, is the reason for an efficient excimer generation in these microplasmas. Excimer efficiencies from 1% to 9% have been measured for argon, xenon, argon fluoride, and xenon chloride direct current excimer emitters, with a radiant excimer emittance of up to 2 W/cm(2) for xenon. Adding small amounts of oxygen to argon has allowed us to generate vacuum ultraviolet line radiation at 130.5 mn with an efficiency approaching 1%. Pulsing xenon discharges with nanosecond electrical pulses has led to an increase in intensity to 15 W/cm(2) and to a simultaneous increase in efficiency to more than 20%. Operating the discharges in an abnormal glow mode has allowed us to generate microdischarge arrays without individual ballast. Applications of these plasma arrays are excimer lamps and plasma reactors. (C) 2003 American Vacuum Society.