LTP-V with EPICS controls system for efficient quality assessment of KB-bender systems

被引：2

作者：

Flechsig, U. ^{[1
]}

Huthwelker, T. ^{[1
]}

Spielmann, S. ^{[1
]}

Krempasky, J. ^{[1
]}

机构：

[1] Paul Scherrer Inst, Swiss Light Source, CH-5232 Villigen, Switzerland

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2011年 / 635卷

关键词：

Metrology; KB mirror; LTP; Slope error; EPICS;

D O I：

10.1016/j.nima.2010.09.114

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a new approach for efficient bender calibration and quality assessment on the example of a KB-mirror system for the refocusing stage at the new PHOENIX beamline of the Swiss Light Source. To reach the target focus of about 2 mu m FWHM with the strong astigmatic imaging ratio of 70:1 in the vertical- and 50:1 in the horizontal direction the bender system of the mirror has to be carefully calibrated to reach the desired elliptic shape. We use off-line slope measurements with the Long Trace Profiler LTP-V from Ocean Optics in our metrology laboratory. The proprietary controls system of the LTP has been replaced by EPICS to allow automatic synchronized measurements over the whole parameter space of the benders. The data acquisition is implemented as four-dimensional scan using the standard EPICS sscan record. The controls of the hardware has been realized with a genSub record for the CCD detector and a stream device for the motion of the LIP head. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：S64 / S68

页数：5

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