Sizeable enhancement of anti-weak localization effect in In2O3-x thin film caused by H2 gas mixing in N2 gas atmosphere on heat treatment

被引:0
作者
Kobori, H
Kawaguchi, M
Hatta, N
Ohyama, T
机构
[1] Konan Univ, Fac Sci & Engn, Dept Phys, Kobe, Hyogo 6588501, Japan
[2] Osaka Univ, Grad Sch Sci, Dept Phys, Toyonaka, Osaka 5600043, Japan
关键词
anti-weak localization; In2O3-x; thin film; heat treatment; H-2; gas;
D O I
10.1016/S1386-9477(02)01025-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Through magneto-conductance measurements, we have observed sizeable enhancement of anti-weak localization (AWL) effect in In2O3-x thin film (60 nm) caused by H-2 gas mixing (10%) in N-2 gas (9090) atmosphere on the heat treatment (HT). In case of the HT in pure N-2 gas, the AWL effect is recognized, but is very small. With respect to those experimental results, we conclude that interstitial indium atoms in In2O3-x are effectively generated and the AWL effect due to the spin-orbit interaction is come up. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:296 / 297
页数:2
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