ZnMgAlO based transparent conducting oxides with modulatable bandgap

被引：25

作者：

Yang, C. ^{[1
,2
]}

Li, X. M. ^{[1
]}

Gao, X. D. ^{[1
]}

Cao, X. ^{[1
,2
]}

Yang, R. ^{[1
,2
]}

Li, Y. Z. ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

来源：

SOLID STATE COMMUNICATIONS | 2011年 / 151卷 / 03期

关键词：

ZnMgAlO films; Laser processing; Impurities in semiconductors; Transparent conducting; LIGHT-EMITTING DEVICES; THIN-FILMS; OPTICAL-PROPERTIES; DEPOSITION;

D O I：

10.1016/j.ssc.2010.11.008

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

ZnMgAlO films with a broad spectral range of optical transmission and high conductivity were prepared by pulsed laser deposition. The optical and electrical properties of ZnMgAlO films could be controlled by adjusting Al and Mg contents. As the Mg content increased from 10 to 30 at.%, the bandgap value could be modulated from 3.78 to 4.66 eV, and the transparent wavelength range was widened within near-UV, visible and near-IR regions. The optimized ZnMgAlO film possesses a wide bandgap of 4.5 eV and a low resistivity of 1.6 x 10(-3) Omega cm. The broad spectral range of optical transmission and high conductivity maked ZnMgAlO films are of interest as TCO window materials for optoelectronic devices. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：264 / 267

页数：4

共 16 条

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