Micropositioners for microscopy applications based on the stick-slip effect

被引:30
作者
Bergander, A [1 ]
Breguet, JM [1 ]
Schmitt, C [1 ]
Clavel, R [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
来源
MHS 2000: PROCEEDINGS OF THE 2000 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE | 2000年
关键词
D O I
10.1109/MHS.2000.903315
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase the working range of those actuators whose stroke is, depending on the material, usually limited to a small fraction of the actuator length, is a stepping motion of the actuator. We use a stepping-motion based on the stick and slip effect in order to achieve a long range while maintaining the advantage of a virtually unlimited resolution, In this paper we introduce miniature x-y-stages dedicated to the manipulation of samples under a microscope. As previous setups and experiments have shown, a parallel kinematic structure for positioning purposes in microscopy or micro assembly is not well suited because x and y motion of the actuators have an influence on each other. A system with a serial kinematic structure has therefore been developed. The proposed device will provide the same capabilities as existing motorized stages, but at a lower cost than manual positioning stages and at a very compact size.
引用
收藏
页码:213 / 216
页数:4
相关论文
共 3 条
[1]  
Breguet J.-M., 1998, ACTUATOR 98. 6th International Conference on New Actuators with Accompanying Exhibition. Conference Proceedings, P198
[2]  
BREGUET JM, 1998, THESIS ECOLE POLYTEC
[3]  
BREGUET JM, 1997, BRAUNSCHWEIG, V2, P397