Dynamics of silicon plume generated by laser ablation and its chemical reaction

被引：15

作者：

Makimura, T

Murakami, K

机构：

[1] Institute of Materials Science, University of Tsukuba, Tsukuba

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00428-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Chemical reaction of laser-ablated silicon particles with oxygen gas diluted with a helium buffer gas is found by means of soft X-ray absorption spectroscopy. In order to make dear the dynamics of silicon laser plume and the mechanism of the chemical reaction, we measured time-resolved spatial distribution of light emission from the laser-ablated particles as well as time- and space-resolved emission spectra.

引用

收藏

页码：242 / 250

页数：9

相关论文

共 19 条

[1] REEVALUATION OF X-RAY ATOMIC ENERGY LEVELS [J].

BEARDEN, JA ;

BURR, AF .

REVIEWS OF MODERN PHYSICS, 1967, 39 (01) :125-&

[2] PHOTOFRAGMENTATION OF MASS-RESOLVED SI-2-12(+) CLUSTERS [J].

BLOOMFIELD, LA ;

FREEMAN, RR ;

BROWN, WL .

PHYSICAL REVIEW LETTERS, 1985, 54 (20) :2246-2249

[3] L2,3 THRESHOLD SPECTRA OF DOPED SILICON AND SILICON-COMPOUNDS [J].

BROWN, FC ;

BACHRACH, RZ ;

SKIBOWSKI, M .

PHYSICAL REVIEW B, 1977, 15 (10) :4781-4788

[4] EVIDENCE OF EFFECTIVE POTENTIAL BARRIERS IN X-RAY ABSORPTION-SPECTRA OF MOLECULES [J].

DEHMER, JL .

JOURNAL OF CHEMICAL PHYSICS, 1972, 56 (09) :4496-&

[5] SIO2 THIN-FILM DEPOSITION BY EXCIMER LASER ABLATION FROM SIO TARGET IN OXYGEN ATMOSPHERE [J].

FOGARASSY, E ;

FUCHS, C ;

SLAOUI, A ;

STOQUERT, JP .

APPLIED PHYSICS LETTERS, 1990, 57 (07) :664-666

[6]

FOGARASSY E, 1992, EUROPEAN MRS MONOGRA, V4

[7] TERM-VALUES AND VALENCE-RYDBERG MIXING IN CORE-EXCITED STATES - SIH4 AND PH3 [J].

FRIEDRICH, H ;

SONNTAG, B ;

RABE, P ;

BUTSCHER, W ;

SCHWARZ, WHE .

CHEMICAL PHYSICS LETTERS, 1979, 64 (02) :360-366

[8] FAST INTENSIFIED-CCD PHOTOGRAPHY OF YBA2CU3O7-X LASER ABLATION IN VACUUM AND AMBIENT OXYGEN [J].

GEOHEGAN, DB .

APPLIED PHYSICS LETTERS, 1992, 60 (22) :2732-2734

[9] C-60 - BUCKMINSTERFULLERENE [J].

KROTO, HW ;

HEATH, JR ;

OBRIEN, SC ;

CURL, RF ;

SMALLEY, RE .

NATURE, 1985, 318 (6042) :162-163

[10]

MAKIMURA T, UNPUB