Thin nanodiamond membranes and their micro structural, optical and photoelectrical properties

被引:37
作者
Mortet, V
D'Haen, J
Potmesil, J
Kravets, R
Drbohlav, I
Vorlicek, V
Rosa, J
Vanecek, M
机构
[1] Acad Sci Czech Republ, Inst Phys, Prague, Czech Republic
[2] Limburgs Univ Ctr, Mat Res Inst, B-3590 Diepenbeek, Belgium
关键词
nanodiamond; structural characterization; optical properties; defect spectroscopy; NANOCRYSTALLINE DIAMOND; FILMS; PHOTOCURRENT; GROWTH; WAVE; CVD;
D O I
10.1016/j.diamond.2004.12.057
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have grown a variety of thin nanocrystalline diamond thin layers on silicon substrates with thicknesses ranging from 100 to 2000 rim. Using a bias enhanced nucleation for nucleation density over 10(10) cm(-2) and changing the deposition conditions and/or using argon dilution we have obtained nanodiamond layers of different structural properties. The nucleation process and growth was monitored with Scanning Electron Microscopy (SEM); cross-section SEM and micro-Raman measurements were used to access the nanodiamond microstructure. Surface topography was followed by SEM and Atomic Force Microscopy. Windows were opened in the silicon substrate to get self-supporting diamond membrane. Diamond membranes are very smooth, homogeneous and transparent from UV to IR. Fourier Transform Photocurrent Spectroscopy has been used to access main electronic defects in the gap of this material. New defects were observed with a peak photoionization energy of 0.37 and 0.40 eV (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:393 / 397
页数:5
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