共 46 条
[1]
[Anonymous], 2004, RF MEMS THEORY DESIG
[7]
CHIDA A, 2013, SID 12 DIGST, V44, P196
[9]
Colinge J.-P., 2004, SILICON ON INSULATOR, VThird
[10]
Diao Y, 2013, NAT MATER, V12, P665, DOI [10.1038/nmat3650, 10.1038/NMAT3650]