Large-area diamond thin film on Q-carbon coated crystalline sapphire by HFCVD

被引:34
作者
Haque, Ariful [1 ]
Pant, Punam [1 ]
Narayan, Jagdish [1 ]
机构
[1] North Carolina State Univ, Mat Sci & Engn, Raleigh, NC 27695 USA
基金
美国国家科学基金会;
关键词
Stresses; Diamond; Sapphire; Chemical vapor deposition; CHEMICAL-VAPOR-DEPOSITION; MICROWAVE-PLASMA; THERMAL-EXPANSION; GROWTH; NUCLEATION; RAMAN; ALUMINA; ENHANCEMENT; PROGRESS; VARIETY;
D O I
10.1016/j.jcrysgro.2018.09.036
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The growth of diamond on transparent substrates like sapphire presents a great challenge because of the large thermal misfit between the film and the substrate, absence of any carbide layer during diamond growth, and low nucleation density during chemical vapor deposition (CVD) growth process. In this study, we report on the use and the role of Q-carbon as an intermediate layer to successfully deposit large-area diamond film on c-sapphire by hot filament chemical vapor deposition (HFCVD). The Q-carbon consists of very high-density diamond tetrahedra which act as the embryo for diamond nucleation. Different techniques such as X-ray diffraction, scanning electron microscopy, and Raman spectroscopy show that continuous diamond films with good crystallinity and without any impurity phase can be deposited on the Q-carbon coated single crystal sapphire substrate. The Q-carbon layer is very adherent and it negates the thermal mismatch between the diamond film and the sapphire substrate. A small blue shift in the Raman peak of the diamond from its equilibrium position suggests the deposition of the CVD diamond film with minimal stress (1.14 GPa). This technique of growing large-area continuous diamond thin film with excellent crystalline quality on a single crystal sapphire substrate can serve as a platform for the development of next-generation corrosion and erosion resistant infrared windows, state-of-the-art optoelectronic devices, and advanced scanning probe microscopy systems.
引用
收藏
页码:17 / 25
页数:9
相关论文
共 54 条
  • [1] QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION
    AGER, JW
    DRORY, MD
    [J]. PHYSICAL REVIEW B, 1993, 48 (04): : 2601 - 2607
  • [2] RAMAN AND PHOTOLUMINESCENCE ANALYSIS OF STRESS STATE AND IMPURITY DISTRIBUTION IN DIAMOND THIN-FILMS
    BERGMAN, L
    NEMANICH, RJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) : 6709 - 6719
  • [3] DIAMOND CRYSTAL-GROWTH BY PLASMA CHEMICAL VAPOR-DEPOSITION
    CHANG, CP
    FLAMM, DL
    IBBOTSON, DE
    MUCHA, JA
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) : 1744 - 1748
  • [4] Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate
    Chen, Yi-Chun
    Chang, Li
    [J]. RSC ADVANCES, 2014, 4 (36) : 18945 - 18950
  • [5] A review of nucleation, growth and low temperature synthesis of diamond thin films
    Das, D.
    Singh, R. N.
    [J]. INTERNATIONAL MATERIALS REVIEWS, 2007, 52 (01) : 29 - 64
  • [6] DIAMOND COATING OF TITANIUM-ALLOYS
    DRORY, MD
    HUTCHINSON, JW
    [J]. SCIENCE, 1994, 263 (5154) : 1753 - 1755
  • [7] ION-BEAM-ASSISTED ETCHING OF DIAMOND
    EFREMOW, NN
    GEIS, MW
    FLANDERS, DC
    LINCOLN, GA
    ECONOMOU, NP
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 416 - 418
  • [8] Raman spectroscopy of nanocrystalline diamond:: An ab initio approach
    Filik, J.
    Harvey, J. N.
    Allan, N. L.
    May, P. W.
    Dahl, J. E. P.
    Liu, S.
    Carlson, R. M. K.
    [J]. PHYSICAL REVIEW B, 2006, 74 (03)
  • [9] Integrated diamond sapphire laser
    Fork, RL
    Walker, WW
    Laycock, RL
    Green, JJA
    Cole, ST
    [J]. OPTICS EXPRESS, 2003, 11 (20): : 2532 - 2548
  • [10] Development of high quality single crystal diamond for novel laser applications
    Friel, Ian
    Geoghegan, Sarah L.
    Twitchen, Daniel J.
    Scarsbrook, Geoffrey A.
    [J]. OPTICS AND PHOTONICS FOR COUNTERTERRORISM AND CRIME FIGHTING VI AND OPTICAL MATERIALS IN DEFENCE SYSTEMS TECHNOLOGY VII, 2010, 7838