Which is the best thin film piezoelectric material?

被引：0

作者：

Muralt, Paul ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films, Mat Sci, Lausanne, Switzerland

来源：

2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年

关键词：

piezoelectric; thin films; MEMS; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The properties of piezoelectric thin films are reviewed for the case of the transverse piezoelectric effect using parallel plate electrodes.

引用

页数：3

共 15 条

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