Which is the best thin film piezoelectric material?

被引：0
|
作者：
Muralt, Paul [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Electroceram Thin Films, Mat Sci, Lausanne, Switzerland
来源：
2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2017年
关键词：
piezoelectric; thin films; MEMS; MEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The properties of piezoelectric thin films are reviewed for the case of the transverse piezoelectric effect using parallel plate electrodes.
引用
收藏
页数：3
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