Electrical isolation and characteristics of permanent magnet-actuated valves for PDMS microfluidics

被引:29
作者
Chen, Chang-Yu [1 ]
Chen, Chang-Hung [1 ]
Tu, Ting-Yuan [1 ]
Lin, Cheng-Ming [1 ]
Wo, Andrew M. [1 ]
机构
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei 106, Taiwan
关键词
ON/OFF MICROVALVE; SINGLE-WAFER; SYSTEMS; DEVICES; FUTURE; DESIGN; SCREW;
D O I
10.1039/c0lc00415d
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
This paper presents a magnetically driven valve via a permanent magnet pressing a spacer against deformable polydimethylsiloxane (PDMS) to fully close a microchannel. Its ability for electrical isolation, time response, and resistance to backpressure are interrogated. Simulation of the valve closing process was commenced along with experimental verification. Effects of PDMS thickness, and dimension and aspect ratio of microchannels were characterized. Up to 10 G Omega electrical isolation was demonstrated, as well as 50-70 ms valve response and similar to 200 kPa resistible pressure. On-demand actuation for arbitrary flow patterns further quantifies its utility. With advantages of simple fabrication, flexible valving location, and no external power requirement, the on/off valve could be leveraged for proof-of-concept microfluidic devices and other applications.
引用
收藏
页码:733 / 737
页数:5
相关论文
共 24 条
[1]   A bidirectional electrostatic microvalve with microsecond switching performance [J].
Bae, Bylinghoon ;
Han, Jeahyeong ;
Masel, Richard I. ;
Shannon, Mark A. .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (06) :1461-1471
[2]   An electromagnetic actuated on/off microvalve fabricated on top of a single wafer [J].
Bintoro, JS ;
Hesketh, PJ .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (06) :1157-1173
[3]   Design, fabrication and characterization of an externally actuated ON/OFF microvalve [J].
Casals-Terre, J. ;
Duch, M. ;
Plaza, J.A. ;
Esteve, J. ;
Perez-Castillejos, R. ;
Valles, E. ;
Gomez, E. .
SENSORS AND ACTUATORS A-PHYSICAL, 2008, 147 (02) :600-606
[4]   Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding [J].
Fu, C ;
Rummler, Z ;
Schomburg, W .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (04) :S96-S102
[5]   Magnetically controlled valve for flow manipulation in polymer microfluidic devices [J].
Gaspar, Attila ;
Piyasena, Menake E. ;
Daroczi, Lajos ;
Gomez, Frank A. .
MICROFLUIDICS AND NANOFLUIDICS, 2008, 4 (06) :525-531
[6]   Development and multiplexed control of latching pneumatic valves using microfluidic logical structures [J].
Grover, WH ;
Ivester, RHC ;
Jensen, EC ;
Mathies, RA .
LAB ON A CHIP, 2006, 6 (05) :623-631
[7]   Ferrofluid-based microchip pump and valve [J].
Hartshorne, H ;
Backhouse, CJ ;
Lee, WE .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 99 (2-3) :592-600
[8]   Incorporation of prefabricated screw, pneumatic, and solenoid valves into microfluidic devices [J].
Hulme, S. Elizabeth ;
Shevkoplyas, Sergey S. ;
Whitesides, George M. .
LAB ON A CHIP, 2009, 9 (01) :79-86
[9]   Rapid prototyping of active microfluidic components based on magnetically modified elastomeric materials [J].
Jackson, WC ;
Tran, HD ;
O'Brien, MJ ;
Rabinovich, E ;
Lopez, GP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02) :596-599
[10]   Micromixers - a review [J].
Nguyen, NT ;
Wu, ZG .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (02) :R1-R16