Study of a scalable large-area radio-frequency helicon plasma source

被引:11
|
作者
Windisch, T. [1 ]
Rahbarnia, K. [1 ,2 ]
Grulke, O. [1 ,2 ]
Klinger, T. [1 ,2 ]
机构
[1] EURATOM, Max Planck Inst Plasma Phys, D-17491 Greifswald, Germany
[2] Ernst Moritz Arndt Univ Greifswald, D-17491 Greifswald, Germany
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2010年 / 19卷 / 05期
关键词
ENERGY-DISTRIBUTIONS; INDUCTIVE DISCHARGES; MODE TRANSITION; ELECTRON-ENERGY; ANTENNA; WAVES; FREQUENCY;
D O I
10.1088/0963-0252/19/5/055002
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A large-area planar spiral antenna has been installed on the linear laboratory device VINETA. For low radio-frequency (RF) powers the induction coil is operated in the inductive discharge mode with typical plasma densities of n approximate to 1 x 10(16) m(-3) and electron temperatures of T(e) approximate to 5 eV. At higher RF powers a transition to the helicon wave sustained discharge mode is observed, in which the density increases by a factor of 200 and T(e) drops by a factor of 2. Detailed measurements of the helicon wavefield show that a helicon wave with azimuthal mode number m = 0 is launched. Due to the larger wave excitation region of the m = 0 discharges the width of the plasma density profile in the helicon mode increases by a factor of 1.5 compared with the standard VINETA helicon operation with a helical m = +1 antenna.
引用
收藏
页数:7
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