Optical tolerancing and principal component analysis

被引：5
|
作者：
Jain, Prateek [1 ]
机构：
[1] KLA Tencor Corp, Milpitas, CA 95035 USA
来源：
APPLIED OPTICS | 2015年 / 54卷 / 06期
关键词：
SYSTEMS;
D O I：
10.1364/AO.54.001439
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This work explores the use of linear principal component analysis (PCA) during an optical design's tolerancing analysis. Chapman et al. [Proc. SPIE 3331, 102 (1998)] have shown the usefulness of the singular value decomposition in realizing an alignment algorithm for a system. This paper explores some insights that can be gained from performing PCA on the Monte Carlo data set obtained during the tolerancing step and comparing it with the singular components of the Jacobian (sensitivity matrix) of the system. (C) 2015 Optical Society of America
引用
收藏
页码：1439 / 1442
页数：4
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