RF Analysis of MEMS Shunt Capacitive Switch with Gold and Aluminium Beam

被引：0

作者：

Agarwal, Saurabh ^{[1
]}

Kumar, Mithlesh ^{[1
]}

Guha, Koushik ^{[1
]}

Baishya, Srimanta ^{[1
]}

机构：

[1] NIT Silchar, Dept Elect & Commun Engn, Silchar 788010, Assam, India

来源：

2015 INTERNATIONAL CONFERENCE ON ADVANCES IN COMPUTER ENGINEERING AND APPLICATIONS (ICACEA) | 2015年

关键词：

Radio Frequency Micro electrelectro mechanical systems (MEMS); Capacitive Switch; CapacitanceRatio;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

In a practical MEMS switch, there is a gap between the beam and the signals lines. Based on this, a study on frequency response starting from dc to radio frequency for Gold and Aluminium is carried out. Study reveals that the pull-in voltage and capacitance ratio for Gold are 13.8 V and 88.3, respectively; while for Aluminium these values are 11.4 V and 82.4, respectively. Also a detailed study of variation of insertion loss with frequency is also carried out. The insertion and isolation losses with gold as beam layer are -1.42 and 40.4 dB, respectively, at radio frequency, while the same losses for Aluminium as beam layer are -1.19 and 36.1 dB, respectively at the same frequency.

引用

页码：267 / 271

页数：5

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