RF Analysis of MEMS Shunt Capacitive Switch with Gold and Aluminium Beam

被引：0
|
作者：
Agarwal, Saurabh [1 ]
Kumar, Mithlesh [1 ]
Guha, Koushik [1 ]
Baishya, Srimanta [1 ]
机构：
[1] NIT Silchar, Dept Elect & Commun Engn, Silchar 788010, Assam, India
来源：
2015 INTERNATIONAL CONFERENCE ON ADVANCES IN COMPUTER ENGINEERING AND APPLICATIONS (ICACEA) | 2015年
关键词：
Radio Frequency Micro electrelectro mechanical systems (MEMS); Capacitive Switch; CapacitanceRatio;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
In a practical MEMS switch, there is a gap between the beam and the signals lines. Based on this, a study on frequency response starting from dc to radio frequency for Gold and Aluminium is carried out. Study reveals that the pull-in voltage and capacitance ratio for Gold are 13.8 V and 88.3, respectively; while for Aluminium these values are 11.4 V and 82.4, respectively. Also a detailed study of variation of insertion loss with frequency is also carried out. The insertion and isolation losses with gold as beam layer are -1.42 and 40.4 dB, respectively, at radio frequency, while the same losses for Aluminium as beam layer are -1.19 and 36.1 dB, respectively at the same frequency.
引用
收藏
页码：267 / 271
页数：5
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