Simultaneous measurement of thickness and refractive index by a single-channel self-mixing interferometer

被引:18
作者
Fathi, M. T. [1 ]
Donati, S. [1 ]
机构
[1] Univ Pavia, Dipartimento Elettron, I-27100 Pavia, Italy
关键词
TRANSPARENT PLATES;
D O I
10.1049/iet-opt.2011.0044
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors introduce a new method for the simultaneous measurement of thickness d and refractive index n of transparent slabs and thin films. The method is based on the optical phase shift measured by a single-channel, self-mixing interferometer (SMI) as a function of the angle of incidence on the sample. The authors use a motorised rotating stage to apply an angular scan up to +/- 65 degrees to the sample. Then, the authors analyse the derivative of phase difference with respect to the rotation angle, apply a standardisation and fit it to the theoretical expression and after a few iterations they are able to simultaneously determine n and d, with a typical accuracy of 0.02 and 1%, respectively.
引用
收藏
页码:7 / 12
页数:6
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