Fabrication of 40 Gb/s front-end optical receivers using spot-size converter integrated waveguide photodiodes

被引:32
作者
Kwon, YH [1 ]
Choe, JS [1 ]
Kim, J [1 ]
Kim, K [1 ]
Choi, KS [1 ]
Choi, BS [1 ]
Yun, H [1 ]
机构
[1] ETRI, Basic Res Lab, Taejon, South Korea
关键词
waveguide photodiode; spot-size converter; optical receiver; selective wet-etching;
D O I
10.4218/etrij.05.0905.0023
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We fabricated 40 Gb/s front-end optical receivers using spot-size converter integrated waveguide photodiodes (SSC-WGPDs). The fabricated SSC-WGPD chips showed a high responsivity of approximately 0.8 A/W and a 3 dB bandwidth of approximately 40 GHz. A selective wet-etching method was first adopted to realize the required width and depth of a tapered waveguide. Two types of electrical pre-amplifier chips were used in our study. One has higher gain and the other has a broader bandwidth. The 3 dB bandwidths of the higher gain and broader bandwidth modules were about 32 and 42 GHz, respectively. Clear 40 Gb/s non-return-to-zero (NRZ) eye diagrams showed good system applicability of these modules.
引用
收藏
页码:484 / 490
页数:7
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