A structure measurement of the CCD pixel by using the X-ray beam

We report here the result of the structure measurement of a charge-coupled device (CCD) pixel with sub pixel resolution by using a new technique. The new technique makes use of a parallel X-ray beam and a metal mesh placed just in front of the CCD. The CCD camera we used in the first experiment, is a conventional system using the TC213 (Texas Instrument Japan (TIJ)) whose pixel size is 12 mu m x 12 mu m with one million pixels. The mesh has 4 mu m diameter holes spaced at 12 mu m intervals. We produced an efficiency map within a typical pixel showing the gate structure in detail. In the reconstruction process, we have to determine the mutual alignment between the CCD and the mesh in detail. The method we used can easily determine it with enough precision. By selecting single pixel events, me determined a pixel boundary. The distribution of two pixel split event can give us more information in the behavior of the primary charge cloud.