Fundamental investigation on transparent replicated mold using an organic-inorganic hybrid material

被引：0
|
作者：
Washiya, R. [1 ]
Ando, T. [1 ]
Ohkubo, H. [2 ]
Kitano, N. [2 ]
Shiota, T. [2 ]
Miyauchi, A. [1 ]
机构：
[1] Hitachi Ltd, Mat Res Lab, 7-1-1 Ohmika Cho, Hitachi, Ibaraki 3191292, Japan
[2] Hitachi Cable Ltd, Hitachi, Ibaraki 3191414, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS | 2007年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：292 / +
页数：2
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