Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique

被引：111
作者：
Cui, Jinfeng [2 ]
Qiang, Li [1 ,2 ]
Zhang, Bin [1 ]
Ling, Xiao [1 ,2 ]
Yang, Tao [1 ,2 ]
Zhang, Junyan [1 ]
机构：
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Lanzhou Univ Technol, Sch Petr Chem Engn, Lanzhou 730050, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 12期
基金：
中国国家自然科学基金;
关键词：
Diamond-like carbon film; Different concentration Ti doping; Low concentration Ti doping; Mechanical properties; Tribological performance; BEAM DEPOSITION TECHNIQUE; NEGATIVE BIAS VOLTAGE; CARBON COATINGS; AMORPHOUS-CARBON; THIN-FILMS; PERFORMANCE; SUBSTRATE;
D O I：
10.1016/j.apsusc.2012.01.072
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Ti-doped diamond-like carbon (DLC) films were deposited on Si substrates at room temperature by magnetron sputtering Ti twin-target in methane and argon mixture atmosphere. The DLC films with different Ti concentrations were fabricated by varying the gas flow ratio of Ar/CH4. X-ray photoelectron spectroscopy (XPS), Raman spectra were used to analyze the composition and the microstructure of the films. The internal stress was calculated by using the Stoney equation, where the curvature of the film/substrate was measured by BGS 6341 type film stress tester. The mechanical and tribological properties of the films were systematically studied by the nano-indentor and reciprocating ball-on-disc tester, respectively. The Ti atomic concentration in the films increased from 0.41% to 8.2% as the Ar/CH4 flow ratio increased from 60/190 to 140/110. The Ti atoms exist mainly in the form of metallic-like Ti rather than TiC when Ti concentration is 0.41%, confirmed by XPS analysis. As the Ti concentration rose to 6.7%, the Ti-DLC films transformed to composite DLC films with carbide phase embedded in the DLC matrix because of the formation of TiC. As a result, the hardness is decreased, while the stress is dramatically increased. The Ti-DLC films with 0.41% Ti doping showed a relatively high hardness (13.75 GPa), low stress (0.56 GPa), extremely low wear rate (similar to 10(-10)mm(3)/Nm) and low friction coefficient (0.05). (C) 2012 Elsevier B. V. All rights reserved.
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收藏
页码：5025 / 5030
页数：6
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