Fabrication of Microstructure Arrays on Photosensitive Glass by Femtosecond Laser

被引：2

作者：

Wan, P. N. ^{[1
]}

Cheng, C. W. ^{[2
]}

Huang, H. W. ^{[3
]}

Chen, J. S. ^{[3
,4
]}

机构：

[1] Natl Chung Cheng Univ, Grad Inst Optomechatron, Chiayi 621, Taiwan

[2] Ind Technol Res Inst, ITRI S, Tainan 734, Taiwan

[3] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan

[4] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 402, Taiwan

来源：

JOURNAL OF LASER MICRO NANOENGINEERING | 2012年 / 7卷 / 01期

关键词：

femtosecond laser; photosensitive glass; microstructures; UV curing; microlens arrays; FOTURAN;

D O I：

10.2961/jlmn.2012.01.0024

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A maskless technique for the fabrication of U-shaped microstructure arrays on the surface of photosensitive glass by femtosecond laser-induced modification is developed. This technique is followed by heat treatment to crystallize the modified area, and the specimen is then placed in acid solution for chemical etching. The surface roughness of the microstructures is further improved by a secondary annealing process. The fabricated photosensitive glass is used as a mold template, and replicated plano-convex cylindrical arrays by UV-replica are also presented. The focusing ability of the microlens arrays on the glass mold and replicate is demonstrated. DOI: 10.2961/jlmn.2012.01.0024

引用

页码：122 / 125

页数：4

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