Femtosecond Laser Micromachining of Fabry-Perot Interferometers in Fused Silica for Refractive Index Sensing

被引：0
|
作者：
Maia, Joao M. [1 ,2 ]
Amorim, Vitor A. [1 ,2 ]
Viveiros, Duarte [1 ,2 ]
Marques, P. V. S. [1 ,2 ]
机构：
[1] INESC TEC, CAP Ctr Appl Photon, Rua Dr Roberto Frias, P-4200465 Porto, Portugal
[2] Univ Porto, Fac Sci, Dept Phys & Astron, Rua Campo Alegre, P-4169007 Porto, Portugal
来源：
FOURTH INTERNATIONAL CONFERENCE ON APPLICATIONS OF OPTICS AND PHOTONICS | 2019年 / 11207卷
关键词：
Fabry-Perot interferometer; femtosecond laser micromachining; fringe visibility; fused silica; Mie scattering; refractive index sensing; wet etching; CHIP;
D O I：
10.1117/12.2527302
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A Fabry-Perot interferometer was fabricated inside a fused silica substrate through femtosecond laser micromachining. The influence of the waveguide's writing parameters on the measured signal's quality was studied for an interferometer with a 27-mu m wide cavity. Optimal signal-to-noise ratio and fringe visibility were obtained for waveguides written at 75 nJ and 50 mu m/s. The same device was characterized with different refractive index liquids, and a maximum sensitivity of 1181.4 +/- 23.6 nm/RIU was obtained in the index range of 1.2962 to 1.3828 (at 1550 nm) for the spectral order m = 46.
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页数：6
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