Vapor phase epitaxy growth of CdTe epilayers for RT x-ray detectors

被引:1
作者
Lovergine, N [1 ]
Mancini, AM [1 ]
Prete, P [1 ]
Cola, A [1 ]
Tapfer, L [1 ]
机构
[1] Univ Lecce, INFM, I-73100 Lecce, Italy
来源
HARD X-RAY GAMMA-RAY AND NEUTRON DETECTOR PHYSICS II | 2000年 / 4141卷
关键词
CdTe; H2T-VPE growth; DC-XRD; Hall measurements; time-of-flight; x-ray detectors;
D O I
10.1117/12.407582
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We report on the growth of thick CdTe layers on ZnTe/(100)GaAs hybrid substrates by the novel H-2 transport vapor phase epitaxy, (H2T-VPE) method. High crystalline quality (100)-oriented CdTe single crystal epilayers can be fabricated under atmospheric pressure and at growth temperatures (T-D) in the 600-800 degreesC interval. Double crystal X-ray diffraction measurements performed on epilayers thicker than 30 mum show CdTe (400) peaks with FWHM<59 arcsec. Samples grown under optimized conditions exhibit mirror-like surfaces. Nominally undoped epilayers grown <650 degreesC are p-type and low resistive, but they turn n-type above 650 degreesC, as a result of donor (likely Ga) diffusion from the substrate. RT resistivities (p) similar to 10 degrees Omega . cm are obtained for 675 degreesC<T-D<700<degrees>C, but p decreases for higher temperatures and thinner samples. Layers grown under these conditions show RT electron concentrations in the 10(14)-10(11) cm(-3) range. The detection capability of H2T-VPE grown CdTe is demonstrated by time-of-flight measurements performed at RT on Au/n-CdTe/n(+)-GaAs diode structures under reverse bias conditions. The present results show the potentials of H2T-VPE for the growth of detector-grade CdTe.
引用
收藏
页码:200 / 209
页数:10
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