[1] Dong A Univ, Dept Mech Engn, 37 Nakdong Daero 550, Busan, South Korea
[2] Univ Waterloo, Mech & Mechatron Engn Dept, 200 Univ Ave West, Waterloo, ON N2L 3G1, Canada
[3] Samsung Elect Co Ltd, Semicond R&D Ctr, Hwaseong Si 18448, Gyeonggi Do, South Korea