Enhancing effects of microcavities on shear-horizontal surface acoustic wave sensors: A finite element simulation study

被引：17
|
作者：
Cular, Stefan [1 ]
Sankaranarayanan, Subramanian K. R. S. [1 ]
Bhethanabotla, Venkat R. [1 ]
机构：
[1] Univ S Florida, Dept Chem & Biochem Engn, Sensors Res Lab, Tampa, FL 33620 USA
来源：
APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 24期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.2949553
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Shear-horizontal surface acoustic wave (SAW) sensors with microcavities in the delay paths of 36 degrees YX-LiTaO3 substrate were studied using finite element methods. Microcavities of square cross sections of sizes lambda/4 and lambda/2 and of different depths were located in the middle of the delay path. Simulation results for nonfilled and polystyrene-filled microcavity devices were compared with standard delay line shear-horizontal SAW, optimized Love-wave, and etched grating sensors. We found that the best case microcavities studied reduce insertion loss by 19.25 dB from 33.28 dB and exhibit velocity sensitivity 4.83 times larger than that of the standard SAW sensor simulated.
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页数：3
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