Lateral shearing interferometer using phase shifting technique without moving element

被引:0
|
作者
Song, JB [1 ]
Lee, YW [1 ]
Lee, IW [1 ]
Lee, JH [1 ]
机构
[1] Korea Res Inst Stand & Sci, Photometry & Imaging Opt Grp, Taejon 305600, South Korea
来源
OPTICAL MANUFACUTRING AND TESTING V | 2003年 / 5180卷
关键词
lateral shearing interferometer; wedge plate; spatial phase shift technique; diffraction grating; 3-step algorithm;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A simple phase shifting (PS) technique without moving element in lateral shearing (LS) interferometer is presented. This method uses Murty's simple LS interferometer with an wedge plate and adds only two identical transmission gratings. The two gratings can make three (or odd number of) equally separated identical test wavefronts. The wedge plate changes the optical path difference between the original wavefront and the sheared wavefront along the wedge direction. So three (or odd number of) interferograms having different phase shift quantity can be obtained simultaneously and 3-step PS interferometry algorithm can be applied.
引用
收藏
页码:445 / 454
页数:10
相关论文
共 50 条
  • [41] Analysis of a material phase shifting element in an atom interferometer
    Perreault, JD
    Cronin, AD
    Conference on Atoms and Molecules Near Surfaces, 2005, 19 : 146 - 150
  • [43] A single-shot phase-shifting radial-shearing interferometer
    Toto-Arellano, N. I.
    Rodriguez-Zurita, G.
    Meneses-Fabian, C.
    Vazquez-Castillo, J. F.
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (04):
  • [44] Design and experiment of electronic speckle shearing phase-shifting pattern interferometer
    Xu T.-H.
    Jing C.
    Jing W.-C.
    Zhang H.-X.
    Jia D.-G.
    Zhang Y.-M.
    Optoelectron. Lett., 2008, 1 (59-61): : 59 - 61
  • [45] Diffractive lateral shearing interferometer for phase shift mask measurement using an excimer laser source
    Schwider, J
    Fütterer, G
    Lindlein, N
    EIGHTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY: MACRO-, MICRO-, AND NANO-TECHNOLOGIES APPLIED IN SCIENCE, ENGINEERING, AND INDUSTRY, 2005, 5776 : 270 - 277
  • [46] Measuring radii of curvature using a calibrated lateral shearing interferometer
    Jaramillo-Nunez, Alberto
    Perez-Meza, Monica
    22ND CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: LIGHT FOR THE DEVELOPMENT OF THE WORLD, 2011, 8011
  • [47] Study of the tear topography dynamics using a lateral shearing interferometer
    Dubra, A
    Paterson, C
    Dainty, C
    OPTICS EXPRESS, 2004, 12 (25): : 6278 - 6288
  • [48] Lateral shearing interferometer for phase shift mask measurement at 193 nm
    Fütterer, G
    Lano, M
    Lindlein, N
    Schwider, J
    OPTICAL MICROLITHOGRAPHY XV, PTS 1 AND 2, 2002, 4691 : 541 - 551
  • [49] Lateral shearing interferometer based on two Ronchi phase gratings in series
    Schreiber, H
    Schwider, J
    APPLIED OPTICS, 1997, 36 (22): : 5321 - 5324
  • [50] Phase-shifting lateral shearing interferometry using wedge-plate and interferometric grating
    Disawal, Reena
    Dhanotia, Jitendra
    Prakash, Shashi
    APPLIED OPTICS, 2014, 53 (31) : 7534 - 7539