EtherCAT enabled Advanced Control Architecture

被引:42
作者
Rostan, Martin [1 ]
Stubbs, Joseph E. [1 ]
Dzilno, Dmitry [2 ]
机构
[1] EtherCAT Technol Grp, Ostendstr 196, D-90482 Nurnberg, Germany
[2] Appl Mat Inc, Santa Clara, CA 95050 USA
来源
2010 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE | 2010年
关键词
D O I
10.1109/ASMC.2010.5551414
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
EtherCAT is becoming quickly adopted globally by the semiconductor, solar and FPD manufacturing industries. This Industrial Ethernet technology is an acknowledged SEMI standard that provides extraordinary real-time performance and topology flexibility, while meeting or even undercutting traditional fieldbus cost levels. EtherCAT enables advanced control architectures: instead of closing the high performance control loops locally in the peripheral devices, EtherCAT gives one the option to control even high speed processes over the bus and thus overcome limitations of the legacy approaches. EtherCAT enabled controls have simplified interfaces and limit supplier dependencies while giving access to previously closed embedded control algorithms.
引用
收藏
页码:39 / 44
页数:6
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