Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

被引：109

作者：

Ahn, Chae Hyuck ^{[1
]}

Ng, Eldwin J. ^{[1
]}

Hong, Vu A. ^{[1
]}

Yang, Yushi ^{[1
]}

Lee, Brian J. ^{[1
]}

Flader, Ian ^{[1
]}

Kenny, Thomas W. ^{[1
]}

机构：

[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 02期

基金：

美国国家科学基金会;

关键词：

Microelectromechanical systems (MEMS) gyroscope; mode-matching; frequency split; (100) single crystal silicon; wineglass mode; STABILITY; VIBRATION; ALIGNMENT;

D O I：

10.1109/JMEMS.2014.2330590

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present four design methods to overcome (100) silicon crystalline anisotropy and achieve mode-matching in wineglass-mode disk resonator gyroscope (DRG). These methods were validated through experimental characterization of more than 145 different devices that arose from simulations. With the proposed methods, the frequency split of the 250-kHz DRG wineglass modes in (100) silicon was reduced from >10 kHz to as low as 96 Hz (<0.04% of 250-kHz resonant frequency) without any electrostatic tuning. Perfect mode-matching is then achieved using electrostatic tuning. Mode-matching was maintained within +/- 10 Hz over a temperature range from -20 degrees C to 80 degrees C. The temperature dependence of quality factor is also discussed in this paper. These results allow for the development of high-performance miniature DRGs tuned for degenerate wineglass mode operation from high-quality crystalline silicon material.

引用

页码：343 / 350

页数：8

共 37 条

[1]

Ahn C. H., 2013, P 17 INT C SOL STAT, P1847

[2] Automatic Mode Matching in MEMS Vibrating Gyroscopes Using Extremum-Seeking Control [J].

Antonello, Riccardo ;

Oboe, Roberto ;

Prandi, Luciano ;

Biganzoli, Fabio .

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2009, 56 (10) :3880-3891

[3]

Ayazi F, 1998, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, P621

[4] Single wafer encapsulation of MEMS devices [J].

Candler, RN ;

Park, WT ;

Li, HM ;

Yama, G ;

Partridge, A ;

Lutz, M ;

Kenny, TW .

IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2003, 26 (03) :227-232

[5] In-plane free vibration of a single-crystal silicon ring [J].

Chang, Chia-Ou ;

Chang, Guo-En ;

Chou, Chan-Shin ;

Chien, Wen-Tien Chang ;

Chen, Po-Chih .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2008, 45 (24) :6114-6132

[6]

Cho J., 2013, 2013 Transducers & Eurosensors XXVII: 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), P1847, DOI 10.1109/Transducers.2013.6627150

[7] Anisotropy effects on the vibration of circular rings made from crystalline silicon [J].

Eley, R ;

Fox, CHJ ;

McWilliam, S .

JOURNAL OF SOUND AND VIBRATION, 1999, 228 (01) :11-35

[8] Alignment of mask patterns to crystal orientation [J].

Ensell, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 53 (1-3) :345-348

[9] Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators [J].

Ghaffari, Shirin ;

Ahn, Chae H. ;

Ng, Eldwin J. ;

Wang, Shasha ;

Kenny, Thomas W. .

MICROELECTRONICS JOURNAL, 2013, 44 (07) :586-591

[10]

He G., 2004, P 15 IEEE INT C MICR, P718

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