New design of an SnO2 gas sensor on low temperature cofiring ceramics

被引：58
|
作者：
Teterycz, H [1 ]
Kita, J
Bauer, R
Golonka, LJ
Licznerski, BW
Nitsch, K
Wisniewski, K
机构：
[1] Wroclaw Univ Technol, Inst Microsyst Technol, PL-50370 Wroclaw, Poland
[2] Dresden Univ Technol, Dept Elect Engn, D-01062 Dresden, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 47卷 / 1-3期
关键词：
thick film; gas sensor; low temperature cofiring ceramics;
D O I：
10.1016/S0925-4005(98)00008-2
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A new design for thick film gas sensors was investigated. The sensors were made by the low temperature cofiring ceramics (LTCC) technique with a platinum heater buried inside the multilayer structure. SnO2 or SnO2 with Pd as catalyst thick films were used as gas sensitive materials. The properties of the gas sensors were measured with methane and carbon monoxide. The results of our study show that LTCC can be successfully applied in sensor technology as well as confirming the correctness of the sensor design. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：100 / 103
页数：4
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