Determination of the phosphorus content in diamond using cathodoluminescence spectroscopy

被引：39
作者：
Barjon, J. [1 ]
Desfonds, P. [1 ]
Pinault, M.-A. [1 ]
Kociniewski, T. [1 ]
Jomard, F. [1 ]
Chevallier, J. [1 ]
机构：
[1] Univ Versailles St Quentin Yvelines, CNRS, Grp Etud Matiere Condensee, F-92195 Meudon, France
来源：
JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 11期
关键词：
D O I：
10.1063/1.2735408
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In n-type diamond doped with phosphorus, exciton properties have been investigated by cathodoluminescence as a function of the phosphorus concentration and the temperature. The homoepitaxial diamond layers were grown by microwave plasma-assisted chemical vapor deposition and doped using a liquid organic precursor of phosphorus (tertiarybutylphosphine). The phosphorus concentration ranges from 5.2x10(16) to 3.3x10(18) cm(-3) as measured by secondary ion mass spectrometry. It is shown that the ratio between the luminescence intensities of the neutral phosphorus-bound exciton and the free exciton follows the dopant concentration. Calibration graphs are presented to determine the phosphorus contents in diamond using cathodoluminescence spectroscopy. (c) 2007 American Institute of Physics.
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页数：4
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