Determination of the phosphorus content in diamond using cathodoluminescence spectroscopy

被引：39

作者：

Barjon, J. ^{[1
]}

Desfonds, P. ^{[1
]}

Pinault, M.-A. ^{[1
]}

Kociniewski, T. ^{[1
]}

Jomard, F. ^{[1
]}

Chevallier, J. ^{[1
]}

机构：

[1] Univ Versailles St Quentin Yvelines, CNRS, Grp Etud Matiere Condensee, F-92195 Meudon, France

来源：

JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 11期

关键词：

D O I：

10.1063/1.2735408

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In n-type diamond doped with phosphorus, exciton properties have been investigated by cathodoluminescence as a function of the phosphorus concentration and the temperature. The homoepitaxial diamond layers were grown by microwave plasma-assisted chemical vapor deposition and doped using a liquid organic precursor of phosphorus (tertiarybutylphosphine). The phosphorus concentration ranges from 5.2x10(16) to 3.3x10(18) cm(-3) as measured by secondary ion mass spectrometry. It is shown that the ratio between the luminescence intensities of the neutral phosphorus-bound exciton and the free exciton follows the dopant concentration. Calibration graphs are presented to determine the phosphorus contents in diamond using cathodoluminescence spectroscopy. (c) 2007 American Institute of Physics.

引用

页数：4

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