Parametrically Amplified Z-Axis Lorentz Force Magnetometer

被引：61

作者：

Thompson, Matthew J. ^{[1
]}

Horsley, David A. ^{[1
]}

机构：

[1] Univ Calif Davis, Davis, CA 95616 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 03期

基金：

美国国家科学基金会;

关键词：

Force measurement; magnetometers; microelectromechanical devices; navigation; parametric amplifiers; MAGNETIC-FIELD MEASUREMENTS; AMPLIFICATION;

D O I：

10.1109/JMEMS.2011.2140355

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a microelectromechanical systems (MEMS) Lorentz force navigation magnetometer whose fabrication is fully compatible with existing foundry processes used to manufacture MEMS inertial sensors. Operating at 1 atm, the magnetometer is shown to have a Brownian-noise-limited field resolution of 87 nT/ root Hz and a corresponding angular resolution of 0.7 degrees / root Hz. To achieve Brownian-noise-limited performance at 1 atm, parametric amplification was performed which amplifies the Lorentz force 40% more than the Brownian noise force and increases the field sensitivity of the device up to 82.5 folds. Here, the parametric signal is also used to perform electromechanical amplitude modulation to mitigate capacitive feedthrough of the drive signal to the sensing electronics. [2010-0229]

引用

页码：702 / 710

页数：9

共 17 条

[1]

*AS KAS MICR SEM I, 2008, AK9873 AS KAS MICR S, P1

[2]

BOUCHAUD J, 2008, SILICON MAGNETIC SEN, P1

[3] Thermomechanical noise limits on parametric sensing with nanomechanical resonators [J].