Titanium nitride - Silicon nitride composite coatings deposited by reactive magnetron sputtering

被引：0
|
作者：
Patscheider, J [1 ]
Diserens, M
Levy, F
机构：
[1] Eidgenoss Mat Prufungs & Forsch Anstalt, CH-8600 Dubendorf, Switzerland
[2] Ecole Polytech Fed Lausanne, Inst Appl Phys, CH-1015 Lausanne, Switzerland
来源：
TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷
关键词：
composite coatings; titanium nitride-silicon; reactive magnetron sputtering;
D O I：
10.4028/www.scientific.net/MSF.287-288.267
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：267 / 267
页数：1
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