Heterogeneous metal oxide channel structure for ultra-high sensitivity phototransistor with modulated operating conditions

被引:12
作者
Zhou, Kuan-Ju [1 ]
Chen, Po-Hsun [2 ]
Zheng, Yu-Zhe [3 ]
Tai, Mao-Chou [4 ]
Wang, Yu-Xuan [5 ]
Chien, Ya-Ting [3 ]
Sun, Pei-Jun [3 ]
Huang, Hui-Chun [3 ]
Chang, Ting-Chang [1 ]
Sze, Simon M. [5 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 80424, Taiwan
[2] Mil Acad, Dept Phys, Kaohsiung 83059, Taiwan
[3] Natl Sun Yat Sen Univ, Dept Mat & Optoelect Sci, Kaohsiung 804, Taiwan
[4] Natl Sun Yat Sen Univ, Dept Photon, Kaohsiung 804, Taiwan
[5] Natl Yang Ming Chiao Tung Univ, Dept Inst Elect, Hsinchu 300, Taiwan
关键词
THIN-FILM TRANSISTORS; NEGATIVE BIAS; HIGH-RESPONSIVITY; INGAZNO; PHOTODETECTOR; TFTS;
D O I
10.1039/d2tc01460b
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, a thin-film transistor with a heterogeneous channel structure was introduced into oxide semiconductors to improve their electrical properties, which resulted in high mobility and lower subthreshold swing (S.S.). To effectively improve the ability of devices for ultraviolet (UV) light sensing, we used the concept of a Sn-doped indium gallium zinc oxide middle layer in the channel, which can effectively reduce the energy band, localized states, and deep level traps. In addition, a higher Zn content in the top and bottom layers was used to achieve the buried channel design for enhancing the overall properties of the devices. Using electron-hole pair recombination, the operating parameters, such as pulse width in an illuminated state and drain sensing voltage in dark conditions, were optimized. A high sensitivity, ultra-high-endurance phototransistor was developed, and the results indicated that the reliability of UV sensing can be effectively enhanced.
引用
收藏
页码:9192 / 9197
页数:6
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