Optical and Mechanical Properties of Silver Film on Glass Substrate

被引：1
|
作者：
Her, Shiuh-Chuan [1 ]
Wang, Yi-Hsia [1 ]
机构：
[1] Yuan Ze Univ, Dept Mech Engn, Chungli 320, Taiwan
来源：
MANUFACTURING SCIENCE AND ENGINEERING, PTS 1-5 | 2010年 / 97-101卷
关键词：
electron-beam vapor deposition; silver film; reflectivity; nanoindentation test; ELASTIC-MODULUS; INDENTATION; SCATTERING;
D O I：
10.4028/www.scientific.net/AMR.97-101.1412
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Silver films were prepared on the glass substrate by electron-beam vapor deposition. The reflectivity of the Ag thin film was measured by a Perkin-Elmer Lambda spectrophotometer in the wavelength region of 450-680 nm. The experimental measurements of reflectivity were validated with the numerical results using the Essential Macleod software. The surface topology and microstructure of the film were examined by means of atomic force microscope (AFM). The effects of the thermal and humidity on the reflectivity of the Ag film were examined by the environmental test. Nanoindentation tests were employed to determine the hardness of the film. The measured hardness of the Ag thin film was found to depend on the penetration depth.
引用
收藏
页码：1412 / 1415
页数：4
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