Preventing thermolysis: precursor design for volatile copper compounds

被引：30

作者：

Coyle, Jason P. ^{[1
]}

Kurek, Agnieszka ^{[1
]}

Pallister, Peter J. ^{[1
]}

Sirianni, Eric R. ^{[2
]}

Yap, Glenn P. A. ^{[2
]}

Barry, Sean T. ^{[1
]}

机构：

[1] Carleton Univ, Dept Chem, Ottawa, ON K1S 5B6, Canada

[2] Univ Delaware, Dept Chem & Biochem, Newark, DE 19716 USA

来源：

CHEMICAL COMMUNICATIONS | 2012年 / 48卷 / 84期

基金：

美国国家科学基金会;

关键词：

ATOMIC LAYER DEPOSITION; CHEMISTRY; FILMS; METAL;

D O I：

10.1039/c2cc35415b

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A copper(I) iminopyrrolidinate was synthesized and evaluated by thermal gravimetric analysis (TGA), solution based H-1 NMR studies and surface chemistry to determine its thermal stability and decomposition mechanism. Copper(I) tert-butyl-imino-2,2-dimethylpyrrolidinate (1) demonstrated superior thermal stability and showed negligible decomposition in TGA experiments up to 300 degrees C as well as no decomposition in solutions at 165 degrees C over 3 weeks.

引用

页码：10440 / 10442

页数：3

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