Study on Sensing Properties of Ion-Sensitive Field-Effect-Transistors Fabricated With Stack Sensing Membranes

被引：11

作者：

Lee, Tzu Nien ^{[1
]}

Chen, Henry J. H. ^{[2
]}

Hsieh, Kuang Chien ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 300, Taiwan

[2] Natl Chi Nan Univ, Dept Elect Engn, Nantou 545, Taiwan

来源：

IEEE ELECTRON DEVICE LETTERS | 2016年 / 37卷 / 12期

关键词：

ISFETs; APTES; SAMs; PH-ISFET;

D O I：

10.1109/LED.2016.2619714

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter addresses the characteristics of biosensor made of ion-sensitive field-effect-transistors (ISFETs) with stacked 3-aminopropyltriethoxysilane/SiO2 sensing membranes. These devices exhibit higher sensitivity, lower hysteresis, and lower drift characteristics as compared with the conventional ones made with a simple layer of oxide. Much improved performance makes ISFETs a favorable choice for future bio-sensing applications.

引用

页码：1642 / 1645

页数：4

共 23 条

[1]

Arslan G, 2006, TURK J CHEM, V30, P203

[2] DEVELOPMENT, OPERATION, AND APPLICATION OF ION-SENSITIVE FIELD-EFFECT TRANSISTOR AS A TOOL FOR ELECTROPHYSIOLOGY [J].

BERGVELD, P .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1972, BM19 (05) :342-&

[3] Weighing of biomolecules, single cells and single nanoparticles in fluid [J].

Burg, Thomas P. ;

Godin, Michel ;

Knudsen, Scott M. ;

Shen, Wenjiang ;

Carlson, Greg ;

Foster, John S. ;

Babcock, Ken ;

Manalis, Scott R. .

NATURE, 2007, 446 (7139) :1066-1069

[4] Ion-Sensitive Field-Effect Transistors With Periodic-Groove Channels Fabricated Using Nanoimprint Lithography [J].

Chen, Henry J. H. ;

Chen, Chih-Yun .

IEEE ELECTRON DEVICE LETTERS, 2013, 34 (04) :541-543

[5] Analytical investigation of the chemical reactivity and stability of aminopropyl-grafted silica in aqueous medium [J].

Etienne, M ;

Walcarius, A .

TALANTA, 2003, 59 (06) :1173-1188

[6]

Herman S. H., 2013, P IEEE 4 CONTR SYST, P132

[7] A Dual-Mode Large-Arrayed CMOS ISFET Sensor for Accurate and High-Throughput pH Sensing in Biomedical Diagnosis [J].

Huang, Xiwei ;

Yu, Hao ;

Liu, Xu ;

Jiang, Yu ;

Yan, Mei ;

Wu, Dongping .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 2015, 62 (09) :2224-2233

[8] Investigation on spatial breakup characteristics of low-pressure jets with particle image velocimetry experiment and volume of fluid-level set simulation [J].

Jiang, Yue ;

Li, Hong ;

Xiang, Qingjiang ;

Chen, Chao .

ADVANCES IN MECHANICAL ENGINEERING, 2016, 8 (03) :1-10

[9] Effects of N2 and O2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator-semiconductor structures [J].

Kao, Chyuan Haur ;

Chen, Hsiang ;

Lee, Ming Ling ;

Liu, Che Chun ;

Ueng, Herng-Yih ;

Chu, Yu Cheng ;

Chen, Ching Bang ;

Chang, Kow Ming .

SENSORS AND ACTUATORS B-CHEMICAL, 2014, 194 :503-510

[10] Multi-analyte biosensors on a CF4 plasma treated Nb2O5-based membrane with an extended gate field effect transistor structure [J].

Kao, Chyuan-Haur ;

Chen, Hsiang ;

Kuo, Lien-Tai ;

Wang, Jer-Chyi ;

Chen, Yun-Ti ;

Chu, Yu-Cheng ;

Chen, Chian-You ;

Lai, Chao-Sung ;

Chang, Shan Wei ;

Chang, Che Wei .

SENSORS AND ACTUATORS B-CHEMICAL, 2014, 194 :419-426

← 1 2 3 →