Preparation of micro- and nanopatterns of polymer chains grafted onto flexible polymer substrates

被引:61
作者
Brack, HP [1 ]
Padeste, C
Slaski, M
Alkan, S
Solak, HH
机构
[1] Paul Scherrer Inst, Electrochem Lab, CH-5232 Villigen, Switzerland
[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
D O I
10.1021/ja0379870
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this work a simple novel method for preparing micro- and nanoscale patterns of polymer chains grafted onto flexible polymer substrates is described. A combination of the two techniques of radiation grafting and "grafting-from" has been made. This combination makes it possible to prepare grafted structures having micro- or nanoscale lateral dimensions that are determined by the electron beam or X-ray irradiation patterns used. The height of the grafted features can be controlled by the irradiation dose or such grafting reaction conditions as time, temperature, or monomer concentration. Our first results for nanopatterned samples demonstrate resolution comparable to those of other polymer-based lithography processes. Copyright © 2004 American Chemical Society.
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页码:1004 / 1005
页数:2
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