Dislocation Reduction by Glide in Epitaxial IV-VI Layers on Si Substrates

被引:3
作者
Zogg, H. [1 ]
机构
[1] ETH, Thin Film Phys Grp, CH-8005 Zurich, Switzerland
关键词
Molecular beam epitaxy; heteroepitaxy; dislocation reduction; lead chalcogenides; SI(111); DENSITIES; GAAS; CAF2;
D O I
10.1007/s11664-012-2031-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is explained with a simple model why the reduction of threading dislocation (TD) densities in epitaxial lattice and thermal expansion mismatched IV-VI layers such as PbSe(111) on Si(111) substrates follows a 1/h (2) dependence where h is the thickness of the layer. This is in contrast to the 1/h dependence for III-V and II-VI layers grown on mismatched substrates. The 1/h (2) dependence results since the thermal mismatch strain is mainly reduced by glide and reactions of the TD in their main {100}-type glide system of the NaCl-type IV-VI semiconductors. In addition, multiple thermal cycles lead to further reduction of the TD densities by glide and fusion since fusion does not cause dislocation blocking.
引用
收藏
页码:1931 / 1935
页数:5
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