Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

被引：56

作者：

Xu, Lei ^{[1
,3
]}

Dai, Zhengfei ^{[2
]}

Duan, Guotao ^{[2
]}

Guo, Lianfeng ^{[1
]}

Wang, Yi ^{[1
]}

Zhou, Hong ^{[1
]}

Liu, Yanxiang ^{[1
]}

Cai, Weiping ^{[2
]}

Wang, Yuelin ^{[1
]}

Li, Tie ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China

[2] Chinese Acad Sci, Key Lab Mat Phys, Anhui Key lab Nanomat & Nanotechnol, Inst Solid State Phys, Hefei 230031, Anhui, Peoples R China

[3] CALTECH, Pasadena, CA 91125 USA

来源：

SCIENTIFIC REPORTS | 2015年 / 5卷

基金：

中国国家自然科学基金;

关键词：

ELECTRONIC NOSE; SNO2; NANOPARTICLES; OXIDE-NANOWIRE; METAL; TEMPERATURE; SENSITIVITY; NO2; CHEMIRESISTORS; NANOTUBES; CATALYSIS;

D O I：

10.1038/srep10507

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Nano-structured gas sensing materials, in particular nanoparticles, nanotubes, and nanowires, enable high sensitivity at a ppb level for gas sensors. For practical applications, it is highly desirable to be able to manufacture such gas sensors in batch and at low cost. We present here a strategy of in-situ wafer-level fabrication of the high-performance micro/nano gas sensing chips by naturally integrating microhotplatform (MHP) with nanopore array (NPA). By introducing colloidal crystal template, a wafer-level ordered homogenous SnO2 NPA is synthesized in-situ on a 4-inch MHP wafer, able to produce thousands of gas sensing units in one batch. The integration of micromachining process and nanofabrication process endues micro/nano gas sensing chips at low cost, high throughput, and with high sensitivity (down to similar to 20 ppb), fast response time (down to similar to 1 s), and low power consumption (down to similar to 30 mW). The proposed strategy of integrating MHP with NPA represents a versatile approach for in-situ wafer-level fabrication of high-performance micro/nano gas sensors for real industrial applications.

引用

页数：12

共 63 条

[31] High-sensitivity humidity sensor based on a single SnO2 nanowire [J].