Mechanical properties of nanocrystalline Ti-B-(N) coatings produced by DC magnetron sputtering

被引:17
作者
García-Luis, A
Brizuela, M
Oñate, JI
Sánchez-López, JC
Martínez-Martínez, D
López-Cartes, C
Fernández, A
机构
[1] Fdn INASMET, San Sebastian, Spain
[2] Univ Sevilla, CSIC, Inst Ciencia Mat Sevilla, E-41071 Seville, Spain
关键词
magnetron sputtering; Ti-B-(N); nanocrystalline; hardness; scratch test; pin-on-disc;
D O I
10.1016/j.surfcoat.2005.02.070
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Ti-B-(N) coatings have been deposited by DC magnetron sputtering using TiB2 targets in Ar/N-2 gas mixtures. The influence of bias voltage and nitrogen flow on the mechanical and tribological properties of these coatings has been studied. Mechanical properties have been evaluated by ultra-microindentation techniques and scratch testing; tribology tests have been performed in a pin-on-disc apparatus with controlled humidity conditions. Microstructural characterization by X-ray diffraction (XRD) and Transmission Electron Microscopy (TEM) demonstrates the nanocrystalline structure of Ti-B-(N) coatings and allows the interpretation of their mechanical behaviour. Hardness values up to 58 GPa have been achieved, depending on deposition conditions. Increasing the bias voltage on the substrates improves the hardness of coatings, while the addition of nitrogen significantly decreases these values. Coating adhesion obtained on highspeed steel is very good in most cases, reaching values higher than 60 N of critical load. Tribotests performed on these coatings against a steel contact (wear conditions: 0.98 N load, 10 cm/s, 50% RH, 10 mm bearing steel ball diameter) have yielded very low wear rates but friction coefficients in the range of 0.6-1.0. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:734 / 738
页数:5
相关论文
共 20 条
[1]   Combined x-ray photoelectron Auger electron spectroscopy glancing angle x-ray diffraction extended x-ray absorption fine structure investigation of TiBxNy coatings [J].
Baker, MA ;
Mollart, TP ;
Gibson, PN ;
Gissler, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (02) :284-291
[2]   Microstructure of d.c. magnetron sputtered TiB2 coatings [J].
Berger, A ;
Coronel, E ;
Olsson, E .
SURFACE & COATINGS TECHNOLOGY, 2004, 185 (2-3) :240-244
[3]   Thick physical vapour deposited TiB2 coatings [J].
Berger, M .
SURFACE ENGINEERING, 2002, 18 (03) :219-223
[4]   TRIBOLOGICAL PROPERTIES OF RF-SPUTTERED TI-B-N COATINGS UNDER VARIOUS PIN-ON-DISC WEAR TEST CONDITIONS [J].
BROSZEIT, E ;
MATTHES, B ;
HERR, W ;
KLOOS, KH .
SURFACE & COATINGS TECHNOLOGY, 1993, 58 (01) :29-35
[5]   STRUCTURE AND PROPERTIES OF TI-B-N COATINGS [J].
GISSLER, W .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :556-563
[6]   Improved anti-wear performance of nanostructured titanium boron nitride coatings [J].
He, JL ;
Miyake, S ;
Setsuhara, Y ;
Shimizu, I ;
Suzuki, M ;
Numata, K ;
Saito, H .
WEAR, 2001, 249 (5-6) :498-502
[7]   Ultrahard Ti-B-N coatings obtained by reactive magnetron sputtering of a Ti-B target [J].
Heau, C ;
Terrat, JP .
SURFACE & COATINGS TECHNOLOGY, 1998, 108 (1-3) :332-339
[8]   PREPARATION AND BEHAVIOR OF WEAR-RESISTANT TIC/TIB2, TIN/TIB2 AND TIC/TIN COATINGS WITH HIGH AMOUNTS OF PHASE BOUNDARIES [J].
HOLLECK, H ;
SCHULZ, H .
SURFACE & COATINGS TECHNOLOGY, 1988, 36 (3-4) :707-714
[9]   Superhard nc-TiN/a-BN and nc-TiN/a-TiBx/a-BN coatings prepared by plasma CVD and PVD:: a comparative study of their properties [J].
Karvankova, P ;
Veprek-Heijman, MGJ ;
Zindulka, O ;
Bergmaier, A ;
Veprek, S .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :149-156
[10]   Structure and properties of TiB2 based coatings prepared by unbalanced DC magnetron sputtering [J].
Kelesoglu, E ;
Mitterer, C .
SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3) :1483-1489