Polymer Piezoresistive MEMS accelerometer with Integrated ITO

被引：0
|
作者：
Saranya, B. T. [1 ]
Anjana, C. [1 ]
Tina, B. S. [1 ]
Seena, V. [1 ]
机构：
[1] Indian Inst Space Sci & Technol, Dept Avion, Dept Space, Thiruvananthapuram, Kerala, India
来源：
2017 IEEE 12TH NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC) | 2017年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：127 / 128
页数：2
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